By combining 3D holographic lithography with 2D lithography, scientists at the University of Illinois at Urbana-Champaign have developed a high-performance 3D micro cell suitable for large scale integrated circuits. The researchers said that this micro-high-energy batteries with excellent performance and scalability, providing people with unlimited imagination, is expected to make a lot of small device applications become a reality. Related papers published in the United States "National Academy of Sciences" on.

Paul Braun, a professor of materials and engineering at the University of Illinois at Urbana-Champaign who is in charge of the study, said miniaturized energy storage technologies have always been a challenge, with micro-devices typically powered by off-chip batteries or power supplies. The main difficulty lies in the 3D electrode, this electrode is very complex, the difficulty of ordinary batteries to achieve relatively large, not to mention on-chip integration. New technologies have successfully overcome the difficulties and made many important applications possible.

Ning Hailong, a graduate student at the University of Illinois at School of Materials and Engineering, said in a paper that they developed a miniature 3D lithium-ion battery using a technology that is highly compatible with existing microelectronics manufacturing. When making the electrodes, they first used the 3D holographic lithography technique to define the internal structure of the electrode, and then used 2D lithography to shape the outer shape of the electrode. With 3D holographic lithography, researchers create the perfect three-dimensional structure with a beam of light that gives the tiny cell a superior porous electrode for rapid conduction of electrons and ions inside the cell.

A significant advantage of this method is that it allows people to flexibly adjust the parameters closely related to the energy and power of the battery, such as the size, shape, surface area, porosity, and bending state of the electrode. This paves the way for the design and manufacture of the next generation of chip energy storage devices.

While 3D holographic lithography requires very precise control of the beam, recent technological advances have drastically reduced the need for optics throughout the process, making it possible to manufacture such a single, single beam and a standard lithography process Micro battery needs.

John Rogers, a professor of materials engineering at the University of Illinois at Illinois, said the technology gives the battery a high degree of scalability and compatibility in the microelectronics manufacturing process. Coupled with high-energy materials such as tin, they also provide exciting new features, including high capacity and good cycle life, which will provide on-chip devices with safe and reliable energy.

Braun said the miniaturization, high-energy and high-power on-chip battery will make great strides in autonomous micro-scale actuators, distributed wireless sensors, transmitters, monitors and portable, implantable medical devices.

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